Publication CODE |
Title |
IEC 62047-29:2017 (2017-11) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 29: ELECTROMECHANICAL RELAXATION TEST METHOD FOR FREESTANDING CONDUCTIVE THIN-FILMS UNDER ROOM TEMPERATURE |
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Price Excl. VAT |
Total number of pages, tables and drawings |
85.00 €
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12. |
Description
IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.
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Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
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Status |
IEC PUBLICATION |
Situation |
Currently active
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Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
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Responsible |
Ir DELENS Marc
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BEC Approval |
2017-11-22 |
ICS-Code (International Standards Classification) |
31.080.99
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NBN Status |
New |
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IEC publication date |
2017-11-22 |
IEC stability date |
2021-12-31 |
IEC file modification date |
2017-11-22 |
IEC last modification date |
2017-12-14 |
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