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Publication details

Publication CODE Title
IEC 60204-33:2009 (2009-12) SAFETY OF MACHINERY - ELECTRICAL EQUIPMENT OF MACHINES - PART 33: REQUIREMENTS FOR SEMICONDUCTOR FABRICATION EQUIPMENT
 
Price Excl. VAT Total number of pages, tables and drawings
424.00 € 247 P..
Description
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
Available files
EN/FR version

Status
Status IEC PUBLICATION
Situation Currently active
Origin
Committee TC 44
SAFETY OF MACHINERY - ELECTROTECHNICAL ASPECTS
Responsible Ir DELENS Marc
Approval
BEC Approval 2009-12-10
Registration 115421
ICS-Code (International Standards Classification) 13.110 , 25.040.30 , 29.020
NBN Status New
IEC publication date 2009-12-10
IEC stability date 2022-12-31
IEC last modification date 2019-11-29