| Publication CODE |
Title |
| IEC TR 63258:2021 (2021-03) |
NANOTECHNOLOGIES - A GUIDELINE FOR ELLIPSOMETRY APPLICATION TO EVALUATE THE THICKNESS OF NANOSCALE FILMS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
159.00 €
|
21. |
Description
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Status |
IEC PUBLICATION |
| Situation |
Currently active
|
|
| Committee |
TC 113
NANOTECHNOLOGY STANDARDISATION FOR ELECTRICAL AND ELECTRONIC PRODUCTS AND SYSTEMS
|
| BEC Approval |
2021-03-19 |
| ICS-Code (International Standards Classification) |
07.120
|
| NBN Status |
New |
|
| IEC publication date |
2021-03-19 |
| IEC stability date |
2025-12-31 |
| IEC file modification date |
2021-03-19 |
| IEC last modification date |
2021-03-19 |
|
