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Publication details

Publication CODE Title
IEC 62047-1:2005 (2005-09) SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS
 
Price Excl. VAT Total number of pages, tables and drawings
159.00 € 49.
Description
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
Available files
EN/FR version

Status
Status IEC PUBLICATION
Situation Withdrawn
Replaced by  IEC 62047-1:2016
Origin
Committee TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
Responsible Ir DELENS Marc
Approval
BEC Approval 2005-09-27
ICS-Code (International Standards Classification) 31.080.99
IEC publication date 2005-09-27
IEC stability date 2014-12-31
IEC last modification date 2016-01-06