Publication CODE |
Title |
NBN EN 62047-10:2011 (2011-09) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES
PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS |
|
Price Excl. VAT |
Total number of pages, tables and drawings |
25.00 €
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3 P. |
Description
Specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained.
The test piece is a cylindrical pillar fabricated on a rigid (or highly stiff) substrate by micromachining technologies, and its aspect ratio (ratio of pillar diameter to pillar height) should be more than 3. This standard is applicable to metallic, ceramic, and polymeric materials.
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Class |
C96
(TELECOMMUNICATIONS - ELECTRONIC MICRO ELECTRONICS - DISCRETE SEMICONDUCTOR DEVICES)
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Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-10:2011.
For the series NBN EN 50XXX, the standards are however complete.
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EN version
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FR version
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DE version
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Status |
Registered trilingual Belgian standard EN or FR or DE |
Situation |
Currently active
|
|
Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
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Responsible |
Ir DELENS Marc
|
BEC Approval |
2011-08-30 |
NBN Approval |
2011-10-21 |
Belgian Official Journal |
2011-11-29 |
Registration |
117006 |
ICS-Code (International Standards Classification) |
31.080.99
|
NBN Status |
New |
|
Date of ratification (d.o.r.) |
2011-08-30 |
Date of availability (d.a.v.) |
2011-09-09 |
Date of announcement (d.o.a.) |
2011-11-30 |
Date of publication (d.o.p.) |
2012-05-30 |
Date of withdrawal former edition (d.o.w.) |
2014-08-30 |
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