Publication CODE |
Title |
NBN EN 62047-22:2014 (2014-09) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES
PART 22: ELECTROMECHANICAL TENSILE TEST METHOD FOR CONDUCTIVE THIN FILMS ON FLEXIBLE SUBSTRATES |
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Price Excl. VAT |
Total number of pages, tables and drawings |
25.00 €
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3 P. |
Description
Specifies a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates. Conductive thin-film structures on flexible substrates are extensively utilized in MEMS, consumer products, and flexible electronics. The electrical behaviours of films on flexible substrates differ from those of freestanding films and substrates due to their interfacial interactions. Different combinations of flexible substrates and thin films often lead to various influences on the test results depending on the test conditions and the interfacial adhesion. The desired thickness of a thin MEMS material is 50 times thinner than that of the flexible substrate, whereas all other dimensions are similar to each other.
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Class |
C96
(TELECOMMUNICATIONS - ELECTRONIC MICRO ELECTRONICS - DISCRETE SEMICONDUCTOR DEVICES)
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Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-22:2014.
For the series NBN EN 50XXX, the standards are however complete.
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FR version
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DE version
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EN version
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Status |
Registered trilingual Belgian standard EN or FR or DE |
Situation |
Currently active
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Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
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Responsible |
Ir DELENS Marc
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BEC Approval |
2014-07-24 |
NBN Approval |
2014-11-28 |
Belgian Official Journal |
2015-01-30 |
Registration |
149162 |
ICS-Code (International Standards Classification) |
31.080.99
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NBN Status |
New |
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Date of ratification (d.o.r.) |
2014-07-24 |
Date of availability (d.a.v.) |
2014-09-26 |
Date of announcement (d.o.a.) |
2014-10-24 |
Date of publication (d.o.p.) |
2015-04-24 |
Date of withdrawal former edition (d.o.w.) |
2017-07-24 |
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