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Publication details

Publication CODE Title
IEC 62047-29:2017 (2017-11) SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 29: ELECTROMECHANICAL RELAXATION TEST METHOD FOR FREESTANDING CONDUCTIVE THIN-FILMS UNDER ROOM TEMPERATURE
 
Price Excl. VAT Total number of pages, tables and drawings
85.00 € 12.
Description
IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
Available files
EN version

Status
Status IEC PUBLICATION
Situation Currently active
Origin
Committee TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
Responsible Ir DELENS Marc
Approval
BEC Approval 2017-11-22
ICS-Code (International Standards Classification) 31.080.99
NBN Status New
IEC publication date 2017-11-22
IEC stability date 2021-12-31
IEC file modification date 2017-11-22
IEC last modification date 2017-12-14