| Publication CODE |
Title |
| IEC 62047-32:2019 (2019-01) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 32: TEST METHOD FOR THE NONLINEAR VIBRATION OF MEMS RESONATORS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
122.00 €
|
37. |
Description
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Status |
IEC PUBLICATION |
| Situation |
Currently active
|
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2019-01-24 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| IEC publication date |
2019-01-24 |
| IEC stability date |
2023-12-31 |
| IEC file modification date |
2019-01-24 |
| IEC last modification date |
2019-01-24 |
|
