| Publication CODE |
Title |
| IEC 62047-34:2019 (2019-04) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 34: TEST METHODS FOR MEMS PIEZORESISTIVE PRESSURE-SENSITIVE DEVICE ON WAFER |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
85.00 €
|
16. |
Description
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Status |
IEC PUBLICATION |
| Situation |
Currently active
|
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2019-04-05 |
| ICS-Code (International Standards Classification) |
31.080.99
, 31.140
|
| NBN Status |
New |
|
| IEC publication date |
2019-04-05 |
| IEC stability date |
2024-12-31 |
| IEC file modification date |
2019-04-05 |
| IEC last modification date |
2019-04-05 |
|
