Publication details

Publication CODE	Title
NBN EN 62047-6:2010 (2010-03)	SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS

Price Excl. VAT	Total number of pages, tables and drawings
25.00 €	3 P.

Description
Specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 µm and 10 µm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, andtest piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.

Class

C96 (TELECOMMUNICATIONS - ELECTRONIC MICRO ELECTRONICS - DISCRETE SEMICONDUCTOR DEVICES)

Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally only available in English or French. Only the cover page is translated and the document itself is in English or in French.

Very important notice: 98% of the text of the NBN EN 55XXX, NBN EN 6XXXX comes from the IEC text which is NOT included. This text can be ordered here: IEC 62047-6:2009. For the series NBN EN 50XXX, the standards are however complete.

NL version

DE version

FR version

EN version

Status

Status	Registered trilingual Belgian standard EN or FR or DE
Situation	Currently active

Origin

Committee	TC 47/SC 47F MICRO-ELECTROMECHANICAL SYSTEMS
Responsible	Ir DELENS Marc

Approval

BEC Approval	2010-03-01
NBN Approval	2010-04-16
Belgian Official Journal	2010-07-16
Registration	106358
ICS-Code (International Standards Classification)	31.080.99
NBN Status	New

Date of ratification (d.o.r.)	2010-03-01
Date of availability (d.a.v.)	2010-03-05
Date of announcement (d.o.a.)	2010-06-01
Date of publication (d.o.p.)	2010-12-01
Date of withdrawal former edition (d.o.w.)	2013-03-01

Correspondences with international standards

Relation	International standard	Date
is identical to	EN 62047-6:2010	2010-03-05
is identical to	IEC 62047-6:2009/ed. 1.0	2009-04-07

Relations to belgian/foreign publications

Type	Origin	Code	Date
Standard	Belgium	NBN EN 62047-2A