| Publication CODE |
Title |
| NBN EN 62047-14:2012 (2012-04) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES
PART 14: FORMING LIMIT MEASURING METHOD OF METALLIC FILM MATERIALS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
25.00 €
|
3 P. |
Description
Describes definitions and procedures for measuring the forming limit of metallic film materials with a thickness range from 0,5 µm to 300 µm. The metallic film materials described herein are typically used in electric components, MEMS and microdevices.
When metallic film materials used in MEMS (see 2.1.2 of IEC 62047-1:2005) are fabricated by a forming process such as imprinting, it is necessary to predict the material failure in order to increase the reliability of the components. Through this prediction, the effectiveness of manufacturing MEMS components by a forming process can also be improved, because the period of developing a product can be reduced and manufacturing costs can thus be decreased. This standard presents one of the prediction methods for material failure in imprinting process.
|
| Class |
C96
(TELECOMMUNICATIONS - ELECTRONIC MICRO ELECTRONICS - DISCRETE SEMICONDUCTOR DEVICES)
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Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-14:2012.
For the series NBN EN 50XXX, the standards are however complete.
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EN version
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FR version
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DE version
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|
| Status |
Registered trilingual Belgian standard EN or FR or DE |
| Situation |
Currently active
|
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2012-04-03 |
| NBN Approval |
2012-06-29 |
| Belgian Official Journal |
2012-08-29 |
| Registration |
127964 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| Date of ratification (d.o.r.) |
2012-04-03 |
| Date of availability (d.a.v.) |
2012-04-06 |
| Date of announcement (d.o.a.) |
2012-07-03 |
| Date of publication (d.o.p.) |
2013-01-03 |
| Date of withdrawal former edition (d.o.w.) |
2015-04-03 |
|
