Publication details
| Publication CODE |
Title |
| NBN EN 62047-15:2015 (2018-05) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 15: TEST METHOD OF BONDING STRENGTH BETWEEN PDMS AND GLASS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
25.00 €
|
3 P.. |
Description
Describes test method for bonding strength between poly dimethyl siloxane (PDMS) and glass. Silicone-based rubber, PDMS, is used for building of chip-based microfluidic devices fabricated using lithography and replica moulding processes. The problem of bonding strength is mainly for high pressure applications as in the case of certain peristaltic pump designs where an off chip compressed air supply is used to drive the fluids in micro channels created by a twin layer, one formed by bondage between glass with replica moulded PDMS and another between PDMS and PDMS. Also, in case of systems having pneumatic microvalves, a relatively high level of bonding particularly between two replica moulded layers of PDMS becomes quite necessary. Usually there is a leakage and debonding phenomena between interface of bonded areas, which causes unstability and shortage of lifetime for MEMS devices. This standard specifies general procedures on bonding test of PDMS and glass chip.
|
| Class |
C
|
Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-15:2015.
For the series NBN EN 50XXX, the standards are however complete.
|
DE version
|
EN version
|
FR version
|
|
Status
| Status |
Registered trilingual Belgian standard EN or FR or DE |
| Situation |
Currently active
|
|
Origin
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
Approval
| BEC Approval |
2015-04-09 |
| NBN Approval |
2015-08-21 |
| Belgian Official Journal |
2015-09-21 |
| Registration |
158586 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| Date of ratification (d.o.r.) |
2018-05-02 |
| Date of availability (d.a.v.) |
2018-05-02 |
| Date of announcement (d.o.a.) |
2015-10-10 |
| Date of publication (d.o.p.) |
2016-01-10 |
| Date of withdrawal former edition (d.o.w.) |
2018-04-09 |
|
Correspondences with international standards
| Relation |
International standard |
Date |
| is identical to |
EN 62047-15:2015
|
2015-07-10 |
| is identical to |
IEC 62047-15:2015/ed. 1.0
|
2015-03-05 |
Relations to belgian/foreign publications
| Type |
Origin |
Code |
Date |
| Standard |
Belgium |
NBN EN 62047-9 |
|
|
