Publication details
| Publication CODE |
Title |
| NBN EN 62047-17:2015 (2015-07) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 17: BULGE TEST METHOD FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
25.00 €
|
3 P.. |
Description
Specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μ to 10 μ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm.
The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.
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| Class |
C
|
Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-17:2015.
For the series NBN EN 50XXX, the standards are however complete.
|
DE version
|
EN version
|
FR version
|
|
Status
| Status |
Registered trilingual Belgian standard EN or FR or DE |
| Situation |
Currently active
|
|
Origin
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
Approval
| BEC Approval |
2015-04-09 |
| NBN Approval |
2015-08-21 |
| Belgian Official Journal |
2015-09-21 |
| Registration |
158588 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| Date of ratification (d.o.r.) |
2015-04-09 |
| Date of availability (d.a.v.) |
2015-07-10 |
| Date of announcement (d.o.a.) |
2015-10-10 |
| Date of publication (d.o.p.) |
2016-01-10 |
| Date of withdrawal former edition (d.o.w.) |
2018-04-09 |
|
Correspondences with international standards
| Relation |
International standard |
Date |
| is identical to |
EN 62047-17:2015
|
2015-07-10 |
| is identical to |
IEC 62047-17:2015/ed. 1.0
|
2015-03-05 |
Relations to belgian/foreign publications
| Type |
Origin |
Code |
Date |
| Standard |
Belgium |
NBN EN 62047-2:2006 |
|
|
