| Publication CODE |
Title |
| IEC 62047-30:2017 (2017-09) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 30: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF MEMS PIEZOELECTRIC THIN FILM |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
122.00 €
|
20. |
Description
IEC 62047-30:2017(E) specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Status |
IEC PUBLICATION |
| Situation |
Currently active
|
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2017-09-15 |
| ICS-Code (International Standards Classification) |
31.080.99
, 31.140
|
| NBN Status |
New |
|
| IEC publication date |
2017-09-15 |
| IEC stability date |
2022-12-31 |
| IEC file modification date |
2017-09-15 |
| IEC last modification date |
2017-09-15 |
|
