| Publication CODE |
Title |
| IEC 62047-1:2005 (2005-09) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
159.00 €
|
49. |
Description
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2005-09-27 |
| ICS-Code (International Standards Classification) |
31.080.99
|
|
| IEC publication date |
2005-09-27 |
| IEC stability date |
2014-12-31 |
| IEC last modification date |
2016-01-06 |
|
