Publication details

Publication CODE	Title
NBN EN 62047-10:2011 (2011-09)	SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS

Price Excl. VAT	Total number of pages, tables and drawings
25.00 €	3 P.

Description
Specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a specimen is measured, and the compressive modulus of elasticity and yield strength can be obtained. The test piece is a cylindrical pillar fabricated on a rigid (or highly stiff) substrate by micromachining technologies, and its aspect ratio (ratio of pillar diameter to pillar height) should be more than 3. This standard is applicable to metallic, ceramic, and polymeric materials.

Class

C96 (TELECOMMUNICATIONS - ELECTRONIC MICRO ELECTRONICS - DISCRETE SEMICONDUCTOR DEVICES)

Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally only available in English or French. Only the cover page is translated and the document itself is in English or in French.

Very important notice: 98% of the text of the NBN EN 55XXX, NBN EN 6XXXX comes from the IEC text which is NOT included. This text can be ordered here: IEC 62047-10:2011. For the series NBN EN 50XXX, the standards are however complete.

EN version

FR version

DE version

Status

Status	Registered trilingual Belgian standard EN or FR or DE
Situation	Currently active

Origin

Committee	TC 47/SC 47F MICRO-ELECTROMECHANICAL SYSTEMS
Responsible	Ir DELENS Marc

Approval

BEC Approval	2011-08-30
NBN Approval	2011-10-21
Belgian Official Journal	2011-11-29
Registration	117006
ICS-Code (International Standards Classification)	31.080.99
NBN Status	New

Date of ratification (d.o.r.)	2011-08-30
Date of availability (d.a.v.)	2011-09-09
Date of announcement (d.o.a.)	2011-11-30
Date of publication (d.o.p.)	2012-05-30
Date of withdrawal former edition (d.o.w.)	2014-08-30

Correspondences with international standards

Relation	International standard	Date
is identical to	EN 62047-10:2011	2011-09-09
is identical to	IEC 62047-10:2011/ed. 1.0	2011-07-26

Relations to belgian/foreign publications

Type	Origin	Code	Date
Standard	Belgium	NBN EN 62047-8