Publication details

Publication CODE	Title
NBN EN 62047-18:2013 (2013-09)	SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES PART 18: BEND TESTING METHODS OF THIN FILM MATERIALS

Price Excl. VAT	Total number of pages, tables and drawings
25.00 €	3 P.

Description
Specifies the method for bend testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 µm and 10 µm. Thin films are used as main structural materials for Micro-electromechanical Systems (abbreviated as MEMS in this document) and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as a few micron meter size, material fabrication by deposition, photolithography, and/ or nonmechanical machining test piece. This International Standard specifies the bend testing and test piece shape for micro-sized smooth cantilever type test pieces, which enables a guarantee of accuracy corresponding to the special features.

Class

C96 (TELECOMMUNICATIONS - ELECTRONIC MICRO ELECTRONICS - DISCRETE SEMICONDUCTOR DEVICES)

Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally only available in English or French. Only the cover page is translated and the document itself is in English or in French.

Very important notice: 98% of the text of the NBN EN 55XXX, NBN EN 6XXXX comes from the IEC text which is NOT included. This text can be ordered here: IEC 62047-18:2013. For the series NBN EN 50XXX, the standards are however complete.

EN version

FR version

DE version

Status

Status	Registered trilingual Belgian standard EN or FR or DE
Situation	Currently active

Origin

Committee	TC 47/SC 47F MICRO-ELECTROMECHANICAL SYSTEMS
Responsible	Ir DELENS Marc

Approval

BEC Approval	2013-08-21
NBN Approval	2013-12-19
Belgian Official Journal	2014-03-14
Registration	145087
ICS-Code (International Standards Classification)	31.080.99
NBN Status	New

Date of ratification (d.o.r.)	2013-08-21
Date of availability (d.a.v.)	2013-09-27
Date of announcement (d.o.a.)	2013-11-21
Date of publication (d.o.p.)	2014-05-21
Date of withdrawal former edition (d.o.w.)	2016-08-21

Correspondences with international standards

Relation	International standard	Date
is identical to	EN 62047-18:2013	2013-09-27
is identical to	IEC 62047-18:2013/ed. 1.0	2013-07-17

Relations to belgian/foreign publications

Type	Origin	Code	Date
Standard	Belgium	NBN EN 62047-6