| Publication CODE |
Title |
| IEC 62047-1:2016 (2016-01) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
249.00 €
|
66 P.. |
Description
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices.
This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2016-01-06 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| IEC publication date |
2016-01-06 |
| IEC stability date |
2021-12-31 |
| IEC file modification date |
2016-01-04 |
| IEC last modification date |
2019-11-04 |
|
