Publication details
| Publication CODE |
Title |
| NBN EN 62047-26:2016 (2016-04) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
25.00 €
|
2 P.. |
Description
Specifies descriptions of trench structure and needle structure in a micrometer scale. In addition, it provides examples of measurement for the geometry of both structures. For trench structures, this standard applies to structures with a depth of 1 µm to 100 µm; walls and trenches with respective widths of 5 µm to 150 µm; and aspect ratio of 0,006 7 to 20. For needle structures, the standard applies to structures with three or four faces with a height, horizontal width and vertical width of 2 µm or larger, and with dimensions that fit inside a cube with sides of 100 µm.
This standard is applicable to the structural design of MEMS and geometrical evaluation after MEMS processes.
|
| Class |
C
|
Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-26:2016.
For the series NBN EN 50XXX, the standards are however complete.
|
DE version
|
EN version
|
FR version
|
|
Status
| Status |
Registered trilingual Belgian standard EN or FR or DE |
| Situation |
Currently active
|
|
Origin
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
Approval
| BEC Approval |
2016-02-11 |
| NBN Approval |
2016-05-27 |
| Belgian Official Journal |
2016-06-14 |
| Registration |
167183 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| Date of ratification (d.o.r.) |
2016-02-11 |
| Date of availability (d.a.v.) |
2016-04-22 |
| Date of announcement (d.o.a.) |
2016-05-11 |
| Date of publication (d.o.p.) |
2016-11-11 |
| Date of withdrawal former edition (d.o.w.) |
2019-02-11 |
|
Correspondences with international standards
| Relation |
International standard |
Date |
| is identical to |
EN 62047-26:2016
|
2016-04-22 |
| is identical to |
IEC 62047-26:2016/ed. 1.0
|
2016-01-09 |
|
