| Publication CODE |
Title |
| NBN EN 62047-4:2010 (2010-10) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES
PART 4: GENERIC SPECIFICATION FOR MEMS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
25.00 €
|
3 P. |
Description
Describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.
|
| Class |
C86
(ELECTRONIC COMPONENTS MICRO ELECTRONICS - DISCRETE SEMICONDUCTORS)
|
Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally
only available in English or French. Only the cover page is translated
and the document itself is in English or in French.
Very important notice: 98% of the text of the NBN EN 55XXX,
NBN EN 6XXXX comes from the IEC text which is NOT included.
This text can be ordered here:
IEC 62047-4:2008.
For the series NBN EN 50XXX, the standards are however complete.
|
EN version
|
FR version
|
DE version
|
|
| Status |
Registered trilingual Belgian standard EN or FR or DE |
| Situation |
Currently active
|
|
| Committee |
TC 47
SEMICONDUCTOR DEVICES
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2010-10-01 |
| NBN Approval |
2010-11-26 |
| Belgian Official Journal |
2011-01-19 |
| Registration |
107995 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| Date of ratification (d.o.r.) |
2010-10-01 |
| Date of availability (d.a.v.) |
2010-10-15 |
| Date of announcement (d.o.a.) |
2011-01-01 |
| Date of publication (d.o.p.) |
2011-07-01 |
| Date of withdrawal former edition (d.o.w.) |
2013-10-01 |
|
