Publication details
| Publication CODE |
Title |
| IEC/IEEE 62659:2015 (2015-09) |
NANOMANUFACTURING - LARGE SCALE MANUFACTURING FOR NANOELECTRONICS |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
85.00 €
|
12 P.. |
Description
IEC/IEEE 62659:2015(E) provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
Status
| Status |
IEC PUBLICATION |
| Situation |
Currently active
|
|
Origin
| Committee |
TC 113
NANOTECHNOLOGY STANDARDISATION FOR ELECTRICAL AND ELECTRONIC PRODUCTS AND SYSTEMS
|
Approval
| BEC Approval |
2015-09-30 |
| ICS-Code (International Standards Classification) |
07.030
, 07.120
, 25.020
|
| NBN Status |
New |
|
| IEC publication date |
2015-09-30 |
| IEC stability date |
2020-12-31 |
| IEC file modification date |
2015-09-18 |
| IEC last modification date |
2020-01-02 |
|
|
