Publication CODE |
Title |
IEC 62047-11:2013 (2013-07) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 11: TEST METHOD FOR COEFFICIENTS OF LINEAR THERMAL EXPANSION OF FREE-STANDING MATERIALS FOR MICRO-ELECTROMECHANICAL SYSTEMS |
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Price Excl. VAT |
Total number of pages, tables and drawings |
122.00 €
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38 P. |
Description
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
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Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
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Status |
IEC PUBLICATION |
Situation |
Currently active
|
|
Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
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Responsible |
Ir DELENS Marc
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BEC Approval |
2013-07-17 |
ICS-Code (International Standards Classification) |
31.080.99
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NBN Status |
New |
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IEC publication date |
2013-07-17 |
IEC stability date |
2023-12-31 |
IEC file modification date |
2013-07-16 |
IEC last modification date |
2018-10-31 |
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