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Publication details

Publication CODE Title
NBN EN 62047-4:2010 (2010-10) SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES PART 4: GENERIC SPECIFICATION FOR MEMS
 
Price Excl. VAT Total number of pages, tables and drawings
25.00 € 3 P.
Description
Describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials.
Class  C86  (ELECTRONIC COMPONENTS MICRO ELECTRONICS - DISCRETE SEMICONDUCTORS)
Available files
ATTENTION: Belgian registered standards (NBN EN or NBN HD) are generally only available in English or French. Only the cover page is translated and the document itself is in English or in French.

Very important notice: 98% of the text of the NBN EN 55XXX, NBN EN 6XXXX comes from the IEC text which is NOT included. This text can be ordered here: IEC 62047-4:2008. For the series NBN EN 50XXX, the standards are however complete.

EN version
FR version
DE version
Status
Status Registered trilingual Belgian standard EN or FR or DE
Situation Currently active
Origin
Committee TC 47
SEMICONDUCTOR DEVICES
Responsible Ir DELENS Marc
Approval
BEC Approval 2010-10-01
NBN Approval 2010-11-26
Belgian Official Journal 2011-01-19
Registration 107995
ICS-Code (International Standards Classification) 31.080.99
NBN Status New
Date of ratification (d.o.r.) 2010-10-01
Date of availability (d.a.v.) 2010-10-15
Date of announcement (d.o.a.) 2011-01-01
Date of publication (d.o.p.) 2011-07-01
Date of withdrawal former edition (d.o.w.) 2013-10-01
Correspondences with international standards
Relation International standard Date
is identical to EN 62047-4:2010 2010-10-15
is identical to IEC 62047-4:2008/ed. 1.0 2008-08-21
Relations to belgian/foreign publications
Type Origin Code Date
Standard Foreign IEC 60617
Standard Foreign IEC 60747-1
Standard Foreign IEC QC 001002-3
Standard Foreign ISO 1000
Standard Foreign ISO 2859-1
Standard Belgium NBN EN 60027 series
Standard Belgium NBN EN 60068-2 series
Standard Belgium NBN EN 60749 series
Standard Belgium NBN EN 62047-1