Publication CODE |
Title |
IEC 62047-32:2019 (2019-01) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 32: TEST METHOD FOR THE NONLINEAR VIBRATION OF MEMS RESONATORS |
|
Price Excl. VAT |
Total number of pages, tables and drawings |
122.00 €
|
37. |
Description
IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.
|
Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
Status |
IEC PUBLICATION |
Situation |
Currently active
|
|
Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
Responsible |
Ir DELENS Marc
|
BEC Approval |
2019-01-24 |
ICS-Code (International Standards Classification) |
31.080.99
|
NBN Status |
New |
|
IEC publication date |
2019-01-24 |
IEC stability date |
2023-12-31 |
IEC file modification date |
2019-01-24 |
IEC last modification date |
2019-01-24 |
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