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Publication details

Publication CODE Title
IEC 62047-6:2009 (2009-04) SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS
 
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85.00 € 30.
Description
IEC 62047-6:2009 specifies the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 µm and 10 µm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, andtest piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
Available files
EN/FR version

Status
Status IEC PUBLICATION
Situation Currently active
Origin
Committee TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
Responsible Ir DELENS Marc
Approval
BEC Approval 2009-04-07
ICS-Code (International Standards Classification) 31.080.99
NBN Status New
IEC publication date 2009-04-07
IEC stability date 2023-12-31
IEC last modification date 2018-10-31