| Publication CODE |
Title |
| IEC 62047-44:2024 (2024-02) |
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 44: TEST METHODS FOR DYNAMIC PERFORMANCES OF MEMS RESONANT ELECTRIC-FIELD-SENSITIVE DEVICES |
| |
| Price Excl. VAT |
Total number of pages, tables and drawings |
|
122.00 €
|
19. |
Description
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric'field'sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric'field'sensitive devices. The statements made in this document are also applicable to MEMS resonant electric'field'sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.
|
| Class |
C990
(IEC PUBLICATIONS IEC PUBLICATIONS)
|
| Status |
IEC PUBLICATION |
| Situation |
Currently active
|
|
| Committee |
TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
|
| Responsible |
Ir DELENS Marc
|
| BEC Approval |
2024-02-22 |
| ICS-Code (International Standards Classification) |
31.080.99
|
| NBN Status |
New |
|
| IEC publication date |
2024-02-22 |
| IEC stability date |
2028-12-31 |
| IEC file modification date |
2024-02-22 |
| IEC last modification date |
2024-02-22 |
|
