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Publication details

Publication CODE Title
IEC 62047-42:2022 (2022-09) SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 42: MEASUREMENT METHODS OF ELECTRO-MECHANICAL CONVERSION CHARACTERISTICS OF PIEZOELECTRIC MEMS CANTILEVER
 
Price Excl. VAT Total number of pages, tables and drawings
139.00 € 22.
Description
IEC 62047-42:2022 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors and micro actuators. In order to obtain actual and precise piezoelectric coefficient of the piezoelectric thin films with microdevice structures, and this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
Available files
EN version

Status
Status IEC PUBLICATION
Situation Currently active
Origin
Committee TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
Responsible Ir DELENS Marc
Approval
BEC Approval 2022-09-16
ICS-Code (International Standards Classification) 31.080.99
NBN Status New
IEC publication date 2022-09-16
IEC stability date 2026-12-31
IEC file modification date 2022-09-16
IEC last modification date 2022-09-16