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Publication details

Publication CODE Title
IEC 62047-44:2024 (2024-02) SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 44: TEST METHODS FOR DYNAMIC PERFORMANCES OF MEMS RESONANT ELECTRIC-FIELD-SENSITIVE DEVICES
 
Price Excl. VAT Total number of pages, tables and drawings
122.00 € 19.
Description
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric'field'sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric'field'sensitive devices. The statements made in this document are also applicable to MEMS resonant electric'field'sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
Available files
EN version

Status
Status IEC PUBLICATION
Situation Currently active
Origin
Committee TC 47/SC 47F
MICRO-ELECTROMECHANICAL SYSTEMS
Responsible Ir DELENS Marc
Approval
BEC Approval 2024-02-22
ICS-Code (International Standards Classification) 31.080.99
NBN Status New
IEC publication date 2024-02-22
IEC stability date 2028-12-31
IEC file modification date 2024-02-22
IEC last modification date 2024-02-22