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Publication details

Publication CODE Title
ISO TS 80004-8:2020 (2020-11) NANOTECHNOLOGIES - VOCABULARY - PART 8: NANOMANUFACTURING PROCESSES
 
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Description
This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.
Class  C990  (IEC PUBLICATIONS IEC PUBLICATIONS)
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Status
Status IEC PUBLICATION
Situation Currently active
Replaces  ISO TS 80004-8:2013
Origin
Committee TC 113
NANOTECHNOLOGY STANDARDISATION FOR ELECTRICAL AND ELECTRONIC PRODUCTS AND SYSTEMS
Approval
BEC Approval 2020-11-19
ICS-Code (International Standards Classification) 01.040.07 , 07.030 , 07.120
NBN Status New
IEC publication date 2020-11-19
IEC stability date 2022-12-31
IEC file modification date 2020-11-23
IEC last modification date 2020-11-23